Molybdenum, niobium, and vanadium bulk deposits produced by high-rate physical vapor depostion techniques (HRPVD) were analyzed for impurity content, grain size and morphology, yield strength, hardness, and bend ductility. Yield strengths of Mo and Nb were comparable to those of wrought material having equivalent grain sizes, while the yield strength of vapor-deposited V was superior to that of wrought V because of its ultrafine (0.7 μm) grain size. Ultrafine-grained refractory metals, such as the V deposits produced in this study, may greatly reduce void formation and growth, which causes dimensional changes and degradation of mechanical properties in reactor structural components. It is suggested that HRPVD techniques may be used to prepare fine-grained materials having superior resistance to swelling induced by fast-neutron irradiation.