Synthesis of metastable epitaxial zinc-blende-structure AlN by solid-state reaction
- 18 May 1992
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 60 (20) , 2491-2493
- https://doi.org/10.1063/1.106943
Abstract
Epitaxial metastable zinc‐blende‐structure β‐AlN was synthesized by the solid‐state reaction between single‐crystal Al(001) and TiN(001) layers grown on MgO(001) by ultrahigh vacuum magnetron sputter deposition. At an annealing temperature Ta=600 °C, the interaction proceeded according to the following overall reaction: 4Al+TiN→Al3Ti+AlN, in which β‐AlN was formed pseudomorphically between cubic TiN and tetragonal Al3Ti layers. The lattice constant of β‐AlN was found to be 0.438 nm, which corresponds to a 3.3% lattice mismatch with the underlying TiN layer.Keywords
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