Thin-Film Morphology and Rutherford Backscattering Spectrometry

• 1 May 1997
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 248-249, 409-412
• https://doi.org/10.4028/www.scientific.net/msf.248-249.409

Abstract

Keywords

• RUTHERFORD BACKSCATTERING
• SCANNING TUNNELING MICROSCOPY
• SURFACE MORPHOLOGY