Auger electron spectroscopy depth profiling during sample rotation

This publication has 5 references indexed in Scilit:

• Multiple-point depth profiling of multilayer Cr/Ni thin film structures on a rough substrate using scanning auger microscopy
  Thin Solid Films, 1985
• Improved depth resolution by sample rotation during Auger electron spectroscopy depth profiling
  Thin Solid Films, 1985
• Thin Film and Depth Profile Analysis
  Published by Springer Nature ,1984
• Depth resolution in composition profiles by ion sputtering and surface analysis for single-layer and multilayer structures on real substrates
  Thin Solid Films, 1981
• Quantitative depth profiling in surface analysis: A review
  Surface and Interface Analysis, 1980