Optical profiler for low reflectance ultrasmooth surfaces

• 1 January 1992
• journal article
• Published by SPIE-Intl Soc Optical Eng in Optical Engineering
• Vol. 31  (11) , 2450-2457
• https://doi.org/10.1117/12.59944

Abstract

Keywords

• OPTICAL PROFILER
• REFLECTANCE ULTRASMOOTH
• LOW REFLECTANCE
• ULTRASMOOTH SURFACES