Thick and homogeneous surface layers obtained by reactive ion-beam-enhanced deposition
- 30 June 1987
- journal article
- Published by Elsevier in Materials Science and Engineering
- Vol. 90, 349-355
- https://doi.org/10.1016/0025-5416(87)90232-1
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- Ion implantation and ion assisted coating of metalsJournal of Vacuum Science & Technology A, 1985
- Formation of BN by nitrogen ion implantation of boron depositsThin Solid Films, 1984
- Applications of ion implantation in metalsThin Solid Films, 1983
- Chemical state of ion-implanted nitrogen in Fe18Cr8Ni steelJournal of Vacuum Science and Technology, 1980
- Characterization of thick chromium-carbon and chromium-nitrogen films deposited by hollow cathode dischargeThin Solid Films, 1977