Design of an atomic force microscope with interferometric position control

• 1 November 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 12  (6) , 3561-3566
• https://doi.org/10.1116/1.587471

Abstract

Keywords

• DESIGN
• INTERFEROMETRIC POSITION
• FORCE MICROSCOPE
• POSITION CONTROL
• ATOMIC FORCE