An integrated force-balanced capacitive accelerometer for low-g applications
- 1 June 1996
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 54 (1-3) , 472-476
- https://doi.org/10.1016/s0924-4247(97)80006-4
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Mechanical-thermal noise in micromachined acoustic and vibration sensorsIEEE Transactions on Electron Devices, 1993