Production of Ultra Thin Silicon Foils
- 1 January 1995
- journal article
- Published by SAGE Publications in Journal of X-Ray Science and Technology
- Vol. 5 (2) , 202-206
- https://doi.org/10.3233/xst-1995-5203
Abstract
Ultra thin silicon foils with thicknesses below 100 nm and large diameters have been produced. Foils with a thickness of 50–60 nm have been used as supporting foils for zone plates and as vacuum windows withstanding a pressure difference of 1 atm.Keywords
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