ZrO2 Nanopowders Prepared by Low‐Temperature Vapor‐Phase Hydrolysis

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Abstract
ZrO2 powder is prepared by low‐temperature vapor‐phase hydrolysis of ZrCl4. TG‐DTA, XRD, Raman, BET, and TEM methods are used to investigate the particle size, phase composition, and agglomeration before and after heat treatment. The results show that the as‐prepared ZrO2 powder is characterized by large surface area (150 m2/g), fine grain size (5.8 nm), and weak agglomeration. Additionally, the as‐prepared ZrO2 powder shows predominantly tetragonal phase attributed to a grain size effect. This route is free of powder drying and calcination processes that are essential for wet chemical preparation, contributing to less agglomeration.