Effect of a surface layer on the stress relaxation of thin films

• 1 July 1996
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 14  (4) , 2454-2461
• https://doi.org/10.1116/1.580036

Abstract

Keywords

• STRESS
• BEHAVIOR
• ALUMINUM FILM
• PLOTS
• MODELS
• COPPER
• RELAXATION
• SILVER
• DISLOCATION