Ion Etching: An Application of the Mathematical Theory of Hyperbolic Conservation Laws

1 May 1988

journal article
Published by The Electrochemical Society in Journal of the Electrochemical Society

Vol. 135 (5) , 1235-1240
https://doi.org/10.1149/1.2095937

Abstract

It is shown that the two‐dimensional ion etching problem is described by a single nonlinear hyperbolic conservation law. A brief description of the theory of such equations is given. Facet corners correspond to shocks. Some exact solutions are presented. Numerical methods are discussed, and computational results are presented.

Keywords

NUMERICAL METHODS
COMPUTATIONAL RESULTS
DIMENSIONAL ION
MATHEMATICAL THEORY
BRIEF DESCRIPTION
SINGLE NONLINEAR
ETCHING PROBLEM
FACET CORNERS
CORNERS CORRESPOND

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