An all solid-state magnetic switching exciter for pumping excimer lasers
- 1 November 1985
- journal article
- conference paper
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 56 (11) , 2018-2020
- https://doi.org/10.1063/1.1138410
Abstract
A thyristor, silicon controlled rectifier (SCR), switched multistage magnetic pulse compressor has been successfully developed for KrF excimer laser excitation. Being composed entirely of solid-state elements, this exciter will provide the extremely long lifetime at high repetition rate operation that cannot be realized by a conventional power supply with a discharge switch.Keywords
This publication has 5 references indexed in Scilit:
- Applications of lasers to chemical processingProceedings of the IEEE, 1982
- Electrical excitation of an XeCl laser using magnetic pulse compressionApplied Physics Letters, 1982
- Ultrafast deep UV Lithography with excimer lasersIEEE Electron Device Letters, 1982
- 200 W KrF gas transport laserIEEE Journal of Quantum Electronics, 1980
- 2-kHz repetition rate XeF laserIEEE Journal of Quantum Electronics, 1979