Fabrication and Characterization of Epitaxial Heavily Phosphorus‐Doped Silicon

• 1 December 1985
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 132  (12) , 3011-3016
• https://doi.org/10.1149/1.2113713

Abstract

Keywords

• PHOSPHORUS