Instability and reliability of silicon field emission array

• 1 May 1996
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 14  (3) , 1889-1894
• https://doi.org/10.1116/1.588573

Abstract

Keywords

• EMISSION ARRAY
• SILICON FIELD
• INSTABILITY AND RELIABILITY
• FIELD EMISSION