Active valves and pumps for microfluidics
- 1 December 1993
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 3 (4) , 216-218
- https://doi.org/10.1088/0960-1317/3/4/012
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- 3.5 mu m thin valves in titanium membranesJournal of Micromechanics and Microengineering, 1992