Photoelectron spectroscopic studies on interfacial reactions in Zr/2×1(100)Si and Zr/SiO2/(100)Si systems
- 1 September 1993
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 11 (5) , 2619-2622
- https://doi.org/10.1116/1.578616
Abstract
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