Multiple Slice Epitaxial Deposition of Silicon in Resistance Heated Furnace

• 1 January 1964
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 111  (9) , 1097-1099
• https://doi.org/10.1149/1.2426325

Abstract

Keywords

• SILICON
• HEATED FURNACE
• RESISTANCE HEATED
• MULTIPLE SLICE
• SLICE EPITAXIAL DEPOSITION