Sputter cleaning of iron substrates and contamination of TiN coatings studied by in situ Auger electron spectroscopy measurements in an ultrahigh vacuum physical vapour deposition apparatus
- 1 July 1991
- journal article
- Published by Elsevier in Materials Science and Engineering: A
- Vol. 139, 339-344
- https://doi.org/10.1016/0921-5093(91)90638-4
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Surface and interface characterization of heat- treated (Ti, Al)N coatings on high speed steel substratesThin Solid Films, 1987
- High resolution auger electron spectroscopy for materials characterizationMicrochimica Acta, 1987
- The adhesion between physically vapour-deposited or chemically vapour-deposited alumina and TiC-coated cemented carbides as characterized by Auger electron spectroscopy and scratch testingThin Solid Films, 1986
- Adhesion of titanium nitride coatings on high-speed steelsJournal of Vacuum Science & Technology A, 1985
- Interfacial chemistry effects on the adhesion of sputter-deposited TiC films to steel substratesThin Solid Films, 1982
- The nature of the transition region formed between dc-bases rf sputtered TiC films and steel substratesSurface Science, 1978