Quantitative analysis of thin oxide layers on tantalum by sputtered neutral mass spectrometry (SNMS)
- 31 December 1982
- journal article
- Published by Elsevier in Applications of Surface Science
- Vol. 10 (3) , 342-348
- https://doi.org/10.1016/0378-5963(82)90165-9
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Comparative SNMS and SIMS studies of oxidized Ce and GdSurface Science, 1979
- Sputtering of Ta2O5 by Ar+ ions at energies below 1 keVSurface Science, 1978
- Sputtered neutral mass spectrometry (SNMS) as a tool for chemical surface analysis and depth profilingApplied Physics B Laser and Optics, 1977
- Evaluation of concentration-depth profiles by sputtering in SIMS and AESApplied Physics A, 1976
- Die Analyse monomolekularer FestkörperoberflÄchenschichten mit Hilfe der SekundÄrionenemissionThe European Physical Journal A, 1970