Future trends in electron beam testing
- 31 December 1987
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 7 (2-4) , 435-444
- https://doi.org/10.1016/s0167-9317(87)80040-0
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- The limits of high-speed e-beam testingMicroelectronic Engineering, 1987
- Picosecond photoelectron scanning electron microscope for noncontact testing of integrated circuitsApplied Physics Letters, 1987
- Electron beam testingMicroelectronic Engineering, 1986
- A Fully-Automated Electron Beam Test System for VLSI CircuitsIEEE Design & Test of Computers, 1985
- Estimate of minimum measurable voltage in the SEMJournal of Physics E: Scientific Instruments, 1977