Self-aligned silicon tips coated with diamondlike carbon

• 1 March 1997
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 15  (2) , 457-459
• https://doi.org/10.1116/1.589598

Abstract

Keywords

• ASPECT RATIO
• FIELD EMISSION