Construction of Photolithographic Phase Gratings Using the Fourier Image Effect

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Abstract
The blurring effect in printing fine grating patterns on photoresist films can be minimized by using the Fourier image effect, which involves the image-forming nature of periodic patterns in the Fresnel region. Experiments using gratings having lattice constants of 3.8 μm and 10 μm are reported. The effectiveness of the Fourier image was confirmed by the evaluation of constructed phase gratings using diffraction efficiency measurements and SEM observations of sectional views. Effects of partial spatial coherence on the quality of gratings are discussed.

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