Thermolysis of an Azide‐Phenolic Resin Composite Film and Its Use as an Antireflective Bottom Layer in the Three‐Layer Resist Process
- 1 April 1987
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 134 (4) , 963-967
- https://doi.org/10.1149/1.2100604
Abstract
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