Influence of Geometry on the Electrochemical Response of Carbon Interdigitated Microelectrodes

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Abstract
Microelectrodes were fabricated by carbonizing photoresist (700–1000°C) that was patterned on a Si wafer by use of a mask and UV photolithography. Two geometric designs of interdigitated carbon microelectrodes were produced with dimensions of about 500 μm length and 50 μm width. The carbon structures were characterized by Raman spectroscopy, atomic force microscopy, and optical microscopy. The electrochemical response of the microelectrodes was investigated by cyclic voltammetry using the redox couple. The collection efficiencies of carbon interdigitated array electrodes (IDAEs) varied from 59 to 90% depending on the cell size, geometry, and generator‐collector arrangement. These collection efficiencies are comparable to those reported with multiband (n > 25 bands) IDAEs. © 2000 The Electrochemical Society. All rights reserved.

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