Electron beam lithography using MEBES IV

• 1 November 1992
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 10  (6) , 2734-2742
• https://doi.org/10.1116/1.585993

Abstract

Keywords

• MEBES IV
• LITHOGRAPHY USING
• USING MEBES
• ELECTRON BEAM LITHOGRAPHY