Stress modification of WSi2.2 films by concurrent low energy ion bombardment during alloy evaporation
- 1 November 1985
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 3 (6) , 2121-2128
- https://doi.org/10.1116/1.573265
Abstract
No abstract availableKeywords
This publication has 0 references indexed in Scilit: