Experimental determination of mass sensitivity of APM sensors by CVD thin films
- 1 January 1994
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 1, 629-632 vol.1
- https://doi.org/10.1109/ultsym.1994.401665
Abstract
Acoustic wave devices have been used as gravimetrical sensors in both gas and liquid environments. In case of corrosive analytes the use of acoustic plate modes (APMs) has proved to be a promising concept as sensor electrodes and analyte are strictly separated. While mass sensitivity of quartz microbalances and surface acoustic waves has been studied in detail both theoretically and experimentally, there are only few data on the mass sensitivity of APMs. In order to overcome this lack of information we determined the mass sensitivity of APMs on ZX-LiNbO 3 using a chemical vapour deposition (CVD) method. Results are reported on the frequency dependence of mass sensitivity and the effects of metallization thickness and applied constant strain. The obtained data are compared to liquid-phase measurementsKeywords
This publication has 7 references indexed in Scilit:
- Acoustic Plate Mode Sensor for Immunochemical ReactionsAnalytical Chemistry, 1994
- Mass sensitivity of acoustic plate mode liquid sensors on ZX–LiNbO3The Journal of the Acoustical Society of America, 1994
- Acoustic wave microsensors. Part IIAnalytical Chemistry, 1993
- Elastic effects of polymer coatings on surface acoustic wavesAnalytical Chemistry, 1990
- Characterization of SH acoustic plate mode liquid sensorsSensors and Actuators, 1989
- Mechanism of operation and design considerations for surface acoustic wave device vapour sensorsSensors and Actuators, 1984
- Verwendung von Schwingquarzen zur W gung d nner Schichten und zur Mikrow gungThe European Physical Journal A, 1959