A novel high-speed polymeric EO Modulator based on a combination of a microring resonator and an MZI
- 26 September 2005
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 17 (10) , 2074-2076
- https://doi.org/10.1109/LPT.2005.854354
Abstract
A Mach-Zehnder interferometer with an electrooptic polymer mircroring resonator adjacent to one of its branches is realized in a polymer layer stack. The microresonator is defined by reactive ion etching in the nonlinear PMMA-DR1 polymer and waveguide definition is done without etching, by using a negative photoresist (SU8) as waveguide layer. Electrooptic coefficients of 10 pm/V and modulation frequencies of 1 GHz were measured.Keywords
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