Evaluation of microlens properties in the presence of high spherical aberration

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Abstract
Microlenses can be generated with various fabrication technologies. Some of these technologies cause large spherical aberrations in the resulting microlenses. We describe an algorithm based on Rayleigh’s quarter-wave criterion, which allows the evaluation of lens parameters for those microlenses. Specifically, we investigate numerical aperture, focal length, and space–bandwidth product with respect to applications in optical microsystems. We apply our algorithm to different types of microlenses, three gradient-index lenses, and one surface-relief lens. The experimental results demonstrate that our algorithm provides a helpful characterization method for microlenses with large aberrations.