Focused ion-beam line profiles: A study of some factors affecting beam broadening

Abstract
The current\u2013density profile of a focused ion beam (FIB) has a central peak accompanied by broader \u2018\u2018wings\u2019\u2019 that, while unimportant in lithographic applications, can lead to unwanted effects during an implantation operation. The origin of the wings, and hence the best way to minimize them, is not clear and needs further study. We have measured the line profiles of several of the ions available in our FIB machine as a function of a number of variables, under ultrahigh vacuum (UHV) conditions. No effects are observed from changes in emission current or deliberate defocusing of the objective lens. There are some changes with beam aperture and/or current, but the biggest differences seem to be associated with a change of source type and hence, possibly, with a change in the source/extractor configuration or in the alloy and the emission process. The wing amplitudes are appreciably lower than many previously observed, and their profiles, at least for the lighter ions studied (Be++, \u2009Be+, and B+), are Gaussian rather than exponential. It seems possible that our UHV conditions may have eliminated a scattering mechanism responsible for the larger, exponential wings previously observed. The corresponding beam and rectangle-edge profiles have been calculated.Peer reviewed: YesNRC publication: Ye

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