Etch rate and surface roughness of deep narrow U-grooves in (110)-oriented silicon
- 1 June 1995
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 5 (2) , 112-114
- https://doi.org/10.1088/0960-1317/5/2/014
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: I . Orientation Dependence and Behavior of Passivation LayersJournal of the Electrochemical Society, 1990
- Anisotropic etching of siliconIEEE Transactions on Electron Devices, 1978