Chemical Vapor Deposition of Diamond on Si Substrate Treated by Using Fluidized Bed.
- 1 January 1992
- journal article
- Published by Society of Chemical Engineers, Japan in KAGAKU KOGAKU RONBUNSHU
- Vol. 18 (1) , 122-127
- https://doi.org/10.1252/kakoronbunshu.18.122
Abstract
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