TEM investigations on PECVD-titanium carbide layers
- 1 January 1994
- journal article
- Published by Springer Nature in Analytical and Bioanalytical Chemistry
- Vol. 349 (1) , 249-251
- https://doi.org/10.1007/bf00323302
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Synthesis and characterization of titanium hydride thin films obtained by reactive cathodic sputteringMaterials Science and Engineering: B, 1993
- Structure and properties of TiCx layers prepared by plasma-assisted chemical vapour deposition methodsMaterials Science and Engineering: A, 1991