Modeling of ion implantation in single-crystal silicon

• 1 August 1995
• journal article
• Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
• Vol. 102  (1-4) , 173-179
• https://doi.org/10.1016/0168-583x(94)00801-9

Abstract

Keywords

• ION IMPLANTATION
• CRYSTAL SILICON
• MODELING OF ION
• SINGLE CRYSTAL