A model calculation of the neutral molecule emission by sputtering processes
- 1 March 1975
- journal article
- research article
- Published by Springer Nature in Zeitschrift für Physik B Condensed Matter
- Vol. 22 (1) , 31-39
- https://doi.org/10.1007/pl00020765
Abstract
No abstract availableKeywords
This publication has 16 references indexed in Scilit:
- Mass spectrometry of neutral molecules sputtered from polycrystalline metals by Ar+-ions of 100?1000 eVZeitschrift für Physik B Condensed Matter, 1975
- Mass spectroscopy of sputtered neutrals and its application for surface analysisSurface Science, 1974
- On the energy distribution of sputtered dimersRadiation Effects, 1974
- A method for surface analysis by sputtered neutralsPhysics Letters A, 1972
- Energieverteilungen bei der Festkörperzerstäubung durch IonenbeschußThe European Physical Journal A, 1970
- Dissociation Energy of Pd2The Journal of Chemical Physics, 1969
- Zum Mechanismus der Ionenbildung und Ionenemission bei der FestkörperzerstÄubungThe European Physical Journal A, 1969
- II. The energy spectrum of ejected atoms during the high energy sputtering of goldPhilosophical Magazine, 1968
- Secondary Positive Ion Emission from Metal SurfacesJournal of Applied Physics, 1959
- Measurements and Collision—Radiation Damage Theory of High-Vacuum SputteringPhysical Review B, 1955