Plasma deposition of Si-N and Si-O passivation layers on three-dimensional sensor devices
- 1 January 1998
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 98 (1-3) , 1510-1517
- https://doi.org/10.1016/s0257-8972(97)00300-9
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Plasma-deposited passivation layers for moisture and water protectionSurface and Coatings Technology, 1995
- Chemical composition of soft vacuum electron beam assisted chemical vapor deposition of silicon nitride/oxynitride films versus substrate temperatureJournal of Vacuum Science & Technology A, 1989