Evolution of Amorphous/Crystalline Interfacial Roughness and End-of-Range Defects during Solid-Phase Epitaxial Regrowth of Ge Implaned Silicon
- 1 December 1993
- journal article
- Published by Trans Tech Publications, Ltd. in Solid State Phenomena
- Vol. 32-33, 463-468
- https://doi.org/10.4028/www.scientific.net/ssp.32-33.463
Abstract
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