Structure and physicomechanical properties of nanocrystalline boride-nitride films
- 1 October 1997
- journal article
- Published by Pleiades Publishing Ltd in Physics of the Solid State
- Vol. 39 (10) , 1661-1666
- https://doi.org/10.1134/1.1129885
Abstract
Results are presented from an electron-microscopy study and x-ray structural analysis of nanocrystalline films based on titanium boride, obtained by rf and dc magnetron sputtering. The composition and formulas of the films are determined by Auger analysis. The hardness and elastic and electrical properties of the films are investigated. The role of size effects and deviations from stoichiometry (structural vacancies) is discussed.Keywords
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