Micro-Energy Flow Beam-Shaped Microactuators and Sensors

• 1 January 1995
• book chapter
• Published by Springer Nature
• p. 329-334
• https://doi.org/10.1007/978-3-7091-2698-1_42

Abstract

Keywords

• ENERGY DISSIPATION
• INTERNAL FRICTION
• GALLIUM ARSENIDE
• BEAM LENGTH
• PIEZO ACTUATOR