Atom-probe field-ion microscopy of a high intensity gallium ion source

• 1 January 1980
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 17  (1) , 203-206
• https://doi.org/10.1116/1.570433

Abstract

Keywords

• PROBE FIELD
• GALLIUM ION
• ION MICROSCOPY
• ATOM
• ION SOURCE
• HIGH INTENSITY GALLIUM