Surface Photovoltage and Deep Level Transient Spectroscopy Measurement of the Fe Impurities in Front‐End Operations of the IC CMOS Process

1 June 1995

journal article
Published by The Electrochemical Society in Journal of the Electrochemical Society

Vol. 142 (6) , L98-L99
https://doi.org/10.1149/1.2044258

Abstract

Surface photovoltage has been employed for in‐line monitoring of Fe contaminants in the front‐end operations of a 0.35 μm IC‐CMOS process. It is shown that SPV can reliably provide information about the Fe impurities despite its inability to detect them in the region adjacent to the water's surface, where IC devices are fabricated.

Keywords

FRONT END

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