Microwave effect in RF magnetron sputtering of PbTiO3
- 1 September 1988
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 33-34, 625-631
- https://doi.org/10.1016/0169-4332(88)90361-3
Abstract
No abstract availableKeywords
This publication has 14 references indexed in Scilit:
- Properties of sputter-deposited PbTiO3, Pb(Zr,Ti)O3, Pb2KNb5O15filmsFerroelectrics, 1985
- Epitaxial growth of ferroelectric PLZT thin film and their optical propertiesApplied Physics A, 1980
- Preparation of PbTiO3Ferroelectric Thin Film by RF SputteringJapanese Journal of Applied Physics, 1979
- Ion-beam deposition of thin films of ferroelectric lead zirconate titanate (PZT)Journal of Applied Physics, 1979
- Some electrical and optical properties of ferroelectric lead-zirconate–lead-titanate thin filmsJournal of Applied Physics, 1977
- Preparation and properties of ferroelectric PLZT thin films by rf sputteringJournal of Applied Physics, 1977
- Ferroelectric PLZT Thin Films Fabricated by RF SputteringJapanese Journal of Applied Physics, 1976
- Investigation of pyroelectric material characteristics for improved infrared detector performanceInfrared Physics, 1975
- PREPARATION AND PROPERTIES OF EPITAXIAL FILMS OF FERROELECTRIC Bi4Ti3O12Applied Physics Letters, 1969
- Some Thin-Film Properties of a New Ferroelectric CompositionJournal of Applied Physics, 1969