Sputter Deposited Multilayer V-UV Mirrors

• 6 August 1985
• proceedings article
• Published by SPIE-Intl Soc Optical Eng
• Vol. 0563, 195
• https://doi.org/10.1117/12.949668

Abstract

Keywords

• NIOBIUM
• X RAY DIFFRACTION
• SUPERLATTICES
• DIFFUSION
• RADIATION
• ALUMINUM
• EXTREME ULTRAVIOLET