Effects of bias and inert gas on properties of diamond-like carbon deposited by d.c. PACVD
- 1 December 1994
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 4 (1) , 62-68
- https://doi.org/10.1016/0925-9635(94)90070-1
Abstract
No abstract availableKeywords
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