Capillary liquid epitaxial growth of LiNbO3 and LiTaO3 single-crystal thin films
- 15 May 1976
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 28 (10) , 575-577
- https://doi.org/10.1063/1.88596
Abstract
A new technique using capillary action, capillary liquid epitaxial (CLE) technique, is described for growing a high‐quality LiNbO3 thin film onto a LiTaO3 substrate. A LiTaO3 single‐crystal film, 2 μm in thickness, was also successfully grown with good epitaxy onto a LiNbO3 substrate by this technique. Evaluation of these films by x‐ray measurements and preliminary experimental results on optical waveguide are reported.Keywords
This publication has 7 references indexed in Scilit:
- Growth and characteristics of LiNbO3 plate crystalsMaterials Research Bulletin, 1975
- The growth of thin films of lithium niobate by chemical vapour de positionMaterials Research Bulletin, 1975
- Liquid-phase-epitaxial growth of single-crystal LiNbO3 thin filmApplied Physics Letters, 1975
- Growth of Lithium Niobate Single Crystal by the Closed-Tube Sulphur Vapour Transport TechniqueJapanese Journal of Applied Physics, 1974
- Optical waveguides of single-crystal LiNbO3 film deposited by rf sputteringApplied Physics Letters, 1974
- Growth of LiNbO3 single-crystal film for optical waveguidesApplied Physics Letters, 1973
- Optical waveguiding layers in LiNbO3 and LiTaO3Applied Physics Letters, 1973