Process and properties of Pt/Pb(Zr, Ti)O3/Pt integrated ferroelectric capacitors
- 1 April 1997
- journal article
- Published by Taylor & Francis in Integrated Ferroelectrics
- Vol. 16 (1-4) , 21-28
- https://doi.org/10.1080/10584589708013026
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Preparation of Lead Zirconate Titanate Thin Films by Reactive EvaporationJapanese Journal of Applied Physics, 1994
- Device miniaturization and lithography in giga-bit-era DRAMs.Journal of Photopolymer Science and Technology, 1994