Effect of implantation energy on surface pitting of SIMOX

Publisher Website

9 December 2002

conference paper
Published by Institute of Electrical and Electronics Engineers (IEEE)

https://doi.org/10.1109/soi.1991.162880

Abstract

No abstract available

Keywords

This publication has 2 references indexed in Scilit:

Low energy SIMOX (LES)
Published by Institute of Electrical and Electronics Engineers (IEEE) ,2003
Characterization of low energy SIMOX (LES) structures
Published by Institute of Electrical and Electronics Engineers (IEEE) ,2002