Range distributions of MeV implants in silicon
- 1 March 1985
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 7-8, 361-365
- https://doi.org/10.1016/0168-583x(85)90582-8
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Range distributions of energetic ionsNuclear Instruments and Methods in Physics Research, 1982
- Heavy ion ranges in aluminium and siliconRadiation Effects, 1978
- Channeling of medium-mass ions through siliconCanadian Journal of Physics, 1968