Fabrication of independent contacts to two closely spaced two-dimensional electron gases using molecular beam epitaxy regrowth and in situ focused ion beam lithography
- 1 March 1994
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 12 (2) , 1293-1295
- https://doi.org/10.1116/1.587026
Abstract
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